JPH0339299Y2 - - Google Patents
Info
- Publication number
- JPH0339299Y2 JPH0339299Y2 JP16916685U JP16916685U JPH0339299Y2 JP H0339299 Y2 JPH0339299 Y2 JP H0339299Y2 JP 16916685 U JP16916685 U JP 16916685U JP 16916685 U JP16916685 U JP 16916685U JP H0339299 Y2 JPH0339299 Y2 JP H0339299Y2
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- gap
- rotor
- shutter
- supply rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000013459 approach Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 3
- 239000000428 dust Substances 0.000 description 5
- 230000002265 prevention Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Supply And Distribution Of Alternating Current (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16916685U JPH0339299Y2 (en]) | 1985-11-05 | 1985-11-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16916685U JPH0339299Y2 (en]) | 1985-11-05 | 1985-11-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6277027U JPS6277027U (en]) | 1987-05-16 |
JPH0339299Y2 true JPH0339299Y2 (en]) | 1991-08-19 |
Family
ID=31102716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16916685U Expired JPH0339299Y2 (en]) | 1985-11-05 | 1985-11-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0339299Y2 (en]) |
-
1985
- 1985-11-05 JP JP16916685U patent/JPH0339299Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6277027U (en]) | 1987-05-16 |
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